| 摘要 |
PURPOSE:To attain simultaneously both forming with high accuracy a coil layer of a multilayer structure and a second magnetic pole layer, and arraying and positioning with high accuracy the tip part of the second magnetic pole layer, by forming each interlayer insulating layer by sticking and forming it with a pattern for covering almost whole the surface of a substrate and forming the second magnetic pole layer, and thereafter, and removing selectively an area part which has been protruded from a coil layer forming area. CONSTITUTION:The first magnetic pole layer 2 and a gap layer 3 are formed in order on a magnetic substrate 1, and thereafter, the first interlayer insulation layer 31 consisting of a hardening resin material of a pattern having an opening part alpha and an opening part betawhich have opened an arraying scheduled area of a tip part of the second magnetic pole layer 9, and a connection scheduled area of the first magnetic pole layer 2 and the second magnetic pole layer 9 on the whole surface on said substrate 1. Subsequently, on the first interlayer insulation layer 31, the second and the third interlayer insulation layers 32, 33 of the same pattern shape as said layer and the first and the second coil layers 5, 7 are formed successively in a laminating shape. Next, the second magnetic pole layer 9 is formed on the third interlayer insulation layer 33. Thereafter, a prescribed pattern shape is obtained by removing an area part of the first, the second and the third interlayer insulation layers 21, 22 and 23 of the periphery, which has been protruded from a forming area of the first and the second coil layers 5, 7 which have been laminated.
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