| 摘要 |
PURPOSE:To improve the sensitivity of an energy sensitive resin liquid by using a polyaldehyde as a sensing agent. CONSTITUTION:The energy sensitive resin liquid is constituted of the polyaldehyde (e.g.: polyphenyl aldehyde) which is the sensing agent and a matrix polymer (e.g.: novolak resin) which is modulated in solubility by the presence thereof. A resist can be made higher in sensitivity and since the dissolution inhibiting power is high, the amt. of the sensing agent can be decreased and the considerable change of the properties of the matrix polymer is obviated according to the above-mentioned constitution. Productivity is, therefore, considerably improved. |
