发明名称 QUADRUPOLE MASS ANALYZER
摘要 PURPOSE:To discriminate a heterogeneous ion of the same mass number and make it analyzable, by detecting the ion subjected to mass separation at a quadruple mass analyzing part, by a detecting part, and having the signal secondarily differentiated on the basis of electron energy for ionization. CONSTITUTION:An ion out of an electron impact type ion source 1 is drawn out by an electrode 5 and fed to a quadruple electrode 6 which impresses a direct current 4 and high frequency out of an oscillator 10 in an interposing manner, and the ion subjected to mass separation is detected by a secondary- electron multiplier 7. Next, the detection signal is inputted into a phase fixed type lock-in amplifier 9 to which output of the oscillator 10 is connected, via a pulse amplifier 8. And, a signal out of the pulse amplifier 8 is outputted after being secondarily differentiated on the basis of a signal out of the oscillator 10. Therefore, electron energy for ionization is swept from the low value to the higher one, whereby a heterogeneous ion of the same mass number is discriminated from a ratio of the peak value obtained and thus analyzable.
申请公布号 JPS62211849(A) 申请公布日期 1987.09.17
申请号 JP19860052594 申请日期 1986.03.12
申请人 ULVAC CORP 发明人 NAKAMURA SHIZUO
分类号 G01N27/62;H01J49/42 主分类号 G01N27/62
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