METHOD OF MANUFACTURING HYDROGENATED AMORPHOUS SILICON THIN FILM AND SOLAR CELL

摘要

The speed of formation of a hydrogenated amorphous silicon (a-Si:H) thin film can be increased by controlling the applied energy in relation of the thin-film forming speed. The application of this technique to the manufacture of a solar cell makes it possible to manufacture, at a high speed, a hydrogenated amorphous silicon solar cell (a-Si:H cell) of a high photoelectric conversion efficiency. The above-mentioned control is effected such that the amount of energy (KJ/g-Si2H6) applied to a thin-film forming gas with disilane as its main body is so selected that the thin-film forming speed is mainly dependent on the flow rate of the gas but not practically affected by the amount of the applied energy.