POSITIONEERTAFEL VOOR EEN SAMENGESTELDE BEWEGING.

摘要

By operating a Z direction position adjustment mechanism by a driving motor, a Z table movable in the X and Y directions can be moved in a Z direction while maintaining its horizontal condition. Vibrations caused in the Z table when the Z table is moved at a high speed in the X and Y directions are damped by vibration damping means provided between the Z table and a base bed fixed to a coarse adjustment table which is mounted on a base and driven in the X and Y directions. Improvement in the accuracy of positioning in the X and Y directions is achieved, as well as a vibration damping effect. A chuck holding member is formed on the table to hold a chuck by suction which in turn holds a mounted member by suction, thereby making the exchange of the chuck easy and preserving the parallelism of the upper surface of the chuck.