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发明名称
XY STAGE
摘要
申请公布号
JPS62207993(A)
申请公布日期
1987.09.12
申请号
JP19860050884
申请日期
1986.03.08
申请人
OMRON TATEISI ELECTRONICS CO
发明人
GOTO HIROSHI
分类号
G12B5/00;G05D3/00;H01L21/67;H01L21/68
主分类号
G12B5/00
代理机构
代理人
主权项
地址
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