| 摘要 |
PURPOSE:To measure even a small flow rate accurately while reducing troubles, by gauging the flow rate of a gas from changes in the resistance value between a pair of electrodes as caused when the gas to be measured passes between the pair of electrodes as bubbles in a conductive liquid. CONSTITUTION:Large bubbles 16 a of a gas 16 to be measured as formed when it is injected into a conductive liquid 14 are deformed into small bubbles 16b while the gas passes through a sponge-like electrode 18. As the gas 16 being measured passes in bubbles between the pair of electrodes in the conductive liquid 14, the resistance value between a pair of electrodes 18 and 18' changes and hence, the change in the resistance is detected with a measuring circuit 20 to measure the flow rate of the gas 16. So to speak, as the gas 16 passes between the pair of electrodes 18 and 18.., the resistance value increases between the electrodes 18 and 18'; the larger the flow rate of the gas, the higher the resistance value. Thus, the flow rate of the gas 16 can be measured by detecting changes in the resistance value with the measuring circuit 20.
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