| 摘要 |
PURPOSE:To obtain an inexpensive and compact gas sensor which can identify the kinds of gases by providing plural sensors which are different in sensitivity to the gases on the same base body. CONSTITUTION:The sensors S1, S2 are provided on the base body 1 consisting of, for example, a silicon substrate. A sensing part 7 is constituted of Pd and a sensing part 8 is constituted of Au, then the sensor S1 has approximately the same sensitivity to a gaseous hydrogen compd. but has the higher sensitivity to gaseous hydrogen as compared to the sensor S2 and therefore the harmless gaseous hydrogen and to harmful gaseous hydrogen compd. can be identified and detected. The identification of various kinds of the gases is made possible by adequately changing the sensing parts 7, 8. The plural sensors having the different sensitivities to the gases are provided on the same substrate in the above-mentioned manner, by which the sensor is made extremely compact and the production cost thereof is reduced.
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