| 摘要 |
PURPOSE:To provide high cooling capacity by emitting a laser to a multilayer film made of a light transmission oxide and 3d transition metal to form pores in the film. CONSTITUTION:After an SiO2 film is formed on a glass substrate, Ti, V, Cr, Mn, Co, Ni, Cu, Zr, Nb, Mo, Ru, Rh, Pd, Ag, Hf, Ta, W, Re, Os, Ir, Au, Pt are sputtered to form an oxide-metal film. Oxide layers and metal layers are alternately sputtered on the oxide-metal film to form a multilayer film which contains 3 layers. Then, when an Ar laser is emitted perpendicularly to the surface of the multilayer film, the laser passes two oxide films, heat is concentrated by the laser in a metal layer 1. When the laser is moved, only the metal layer can be removed. When the laser is moved according to this system, cooling pores can be formed at arbitrary positions to obtain a high density cooling plate. |
