| 摘要 |
PURPOSE:To form a pattern having no XY anisotropy and only a little edge roughness by using beams having distribution, in which the extension of Gaussian type distribution is cut on its midway, and increasing the inclination of the rise of a dose profile in the X direction. CONSTITUTION:Beams emitted from an electron gun 1 are focussed by a first condenser lens 2, and image-formed to a slit 8 for forming beams. Beams emitted from the slit 8 take a distribution shape that the outside is cut off from the radius of the beams on the X direction side from beams having circular- section Gaussian intensity distribution. The beams are reduced by a second condenser lens 4 and an objective 7, and image-formed onto a target 6 under the state in which they are deformed by some aberration. Consequently, the inclination of the rise of a dose profile in the X direction is increased. Accordingly, a pattern having no XY anisotropy and only a little edge roughness is shaped.
|
