| 摘要 |
PURPOSE:To carry large-aperture wafers using a carrier suitable to these by providing a hole in part of the large-aperture wafers. CONSTITUTION:Large-aperture wafers 1 can be transferred collectively every lot using a supporting body (carrier) by providing an opening part 2 in part of the wafers 1. The supporting body consists of a knob 6, pedestal parts 3 and a barlike supporting body 5. Moreover, a housing body 4 is provided with grooves 8 for housing stably a plurality of the wafers and long notch parts 7 for housing the barlike supporting body. Thereby, the transfer and housing of the large-aperture wafers can be carried out safely and speedily while the reliability is secured.
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