发明名称 |
Vacuum monitoring apparatus. |
摘要 |
<p>The invention provides a wide range pressure gauge comprising a thermal-conductivity gauge and a high-vacuum total or partial pressure gauge such as a hot-cathode ionization gauge or a residual gas mass spectrometer, mounted from a common flange. In order to allow the use of a filament (3) shorter than those conventionally used in thermal conductivity pressure gauges, means (49-54) are provided to maintain the filament temperature substantially constant over its entire pressure range. Pressure is measured by means (51, 52, 56-58) adapted to measure the power dissipated in the filament (3). </p> |
申请公布号 |
EP0233784(A2) |
申请公布日期 |
1987.08.26 |
申请号 |
EP19870301394 |
申请日期 |
1987.02.18 |
申请人 |
VG INSTRUMENTS GROUP LIMITED |
发明人 |
GRANT, ROBERT BRUCE;JULLIEN, JOSEPH PAUL ROBERT |
分类号 |
G01L21/00;G01L21/12;G01L21/32 |
主分类号 |
G01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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