| 摘要 |
PURPOSE:To easily manufacture an inspection system for substrates and to shorten the inspection time by storing all signals outputted from specific output terminals of a substrate to be inspected, and deciding whether they are normals or not in order. CONSTITUTION:The substrate 12 to be inspected is provided with an input means for inputting a specific signal (a) for operating the substrate. Further, an analog signal storage circuit 35 and a digital signal storage circuit 30 are provided to store signals from respective output terminals which are detected by a detecting means connected to the output terminal of the board 12. Then, the signals (b) and (c) stored in the circuits 35 and 30 are compared with reference values predetermined according to the respective input terminals and a CPU 16 is provided to discriminate whether the output signals are normal or not. Consequently, when the CPU 16 operates the substrate 12 by inputting a prescribed signal (a) to the substrate 12, respective signals outputted from prescribed terminals of the substrate 12 are detected by a detecting means and all stored 35 and 30 regardless of the timing of the input signal and the CPU 16 discriminates whether or not the respective output signals are normal or not.
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