| 摘要 |
PURPOSE:To eliminate the need of a packing seal in a portion for installing a positioning device for a vacuum ion equipment by changing the magnetomotive force of magnetic poles facing each other in a stator, and making a standstill of a member consisting of a ferromagnetic material and provided in a magnetic pole. CONSTITUTION:In the case when a voltage from a power supply is applied to coils, and magnetomotive forces of respective magnetic poles 10a-10d are equalled, a cylindrical member of magnetic substance in an ion optical system 11 is brought to a standstill at the center of a stator 10 in its floating condition in the mid air. By increasing or decreasing the magnetomotive force of one magnetic pole, e.g., the magnetic substance can be displaced toward the X-axis therefoere, position of the magnetic substance can be controlled. By this, an 'O' ring which is required to insert a straightener into the stator is not needed, and fine adjustment such as mum order would be possible since alignment of the shaft of the ion optical system 11 is controlled electrically.
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