| 发明名称 |
PROCESS FOR PRODUCING SEMICONDUCTOR DEVICES, DEVICES PRODUCED BY THE PROCESS, AND CIRCUITS AND ARTICLES INCLUDING SUCH DEVICES |
| 摘要 |
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| 申请公布号 |
EP0032024(B1) |
申请公布日期 |
1987.08.19 |
| 申请号 |
EP19800304585 |
申请日期 |
1980.12.18 |
| 申请人 |
FUJITSU LIMITED |
发明人 |
TAKASAKI, KANETAKE;MAEDA, MAMORU |
| 分类号 |
H01L21/318;H01L21/32;H01L21/314;H01L21/316;H01L21/762;(IPC1-7):H01L21/314;H01L21/76 |
主分类号 |
H01L21/318 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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