发明名称 Ceramic wiring substrate and method of forming it.
摘要 <p>A ceramic wiring substrate has at least one layer of a signal line pattern, a ground electrode pattern layer, and a cavity formed by a region which covers part of or completely the signal line pattern inside ceramic between the signal line pattern and the ground electrode pattern.</p>
申请公布号 EP0233085(A2) 申请公布日期 1987.08.19
申请号 EP19870301224 申请日期 1987.02.12
申请人 NEC CORPORATION 发明人 IKEDA, TERUYUKI;UTSUMI, KAZUAKI
分类号 H05K3/46;H01L21/48;H01L23/538;H01L23/64;H05K1/02;H05K1/03 主分类号 H05K3/46
代理机构 代理人
主权项
地址