| 摘要 |
PURPOSE:To adjust the quantity of light to an irradiated surface properly by rotating an interference filter and varying the angle of incidence of incident luminous flux. CONSTITUTION:The interference filter 3 is rotated by a driving device 18 with a command signal from a monitor device 17 to vary the angle of incidence of the luminous flux I2, varying the quantity of transmitted light from the interference filter 3. Then two split pieces I1 and I2 of luminous flux are converged through a total reflecting mirror 4 and a half-mirror 5 and the output value of the total quantity of light is controlled. Thus, the light quantity control means consisting of the interference filter is provided on the optical path of one of plural split pieces of luminous flux to adjust the output of the total quantity of light.
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