| 摘要 |
PURPOSE:To reduce the consumption of a laser gas, by performing the exhaust and supply of a laser gas at every specified time or based on the detection result of a deteriorated gas. CONSTITUTION:During a laser oscillation, a deteriorated gas is exhausted at a previously set time by an exhausting system 25, and, at the same time, a new laser gas is supplied from a mixed gas tank 27. Exhausting and supplying operations like this are performed with a specified period. Instead of this method, a gas exchange is available wherein the exhausting system 25 and a gas mixing system 29 are operated only in the case of occurrence of gas deterioration whose degree is detected by a sensor 35. Thereby, the consumption of gas can be reduced as compared with a method wherein exhausting and supplying gas are always performed. |
