| 摘要 |
PURPOSE:To obtain a medium having an excellent recording and reproducing characteristic by controlling the hydrocarbon partial pressure different from the supply hydrocarbon generated by electric discharge within a specific range in the stage of forming an optical recording film by subjecting a metallic target to plasma sputtering of gas contg. hydrocarbon. CONSTITUTION:A base plate consisting of a transparent resin, glass, etc. is placed on a base plate holder 6 in a vacuum vessel 1 and after the inside of the vessel is evacuated to about 10<-6>Torr, hydrocarbon such as CH4, C2H4 or the like is introduced through an introducing port 3 into the vessel within a 10<-3>-10<-2> Torr. Electric power is then impressed between a target 4 such as Te, Sb, Ag or the like attached to a power impressing terminal 5 so as to face a holder 6 and an electrode 6 to generate discharge. The discharge is so controlled as to maintain P1/P2 within a 2-12 range where the partial pressure of C2H2 in the case of CH4 formed as a result of dissociation by the discharge and C2H4 in the case of C2H6 is designated as P2 and the partial pressure of CH4, C2H6 prior to the discharge as P1. The optical recording film thus formed contains an adequate amt. of metal as well as C and H, has >=40% reflectivity and good flatness of the surface. The medium having an excellent recording and reproducing characteristic is thus obtd. with a high deposition rate of the optical recording layer. |
