| 摘要 |
PURPOSE:To obtain a magnetic recording medium which excels in the wear resistance and the corrosion resistance, by forming a nitride thin film of a ferromagnetic metal on the surface of a vapor-deposited ferromagnetic metallic thin film by the reaction cluster ion beam method. CONSTITUTION:A vapor-deposited film of a ferromagnetic metal is formed on a base material 5 by the cluster ion beam method in which the cluster of a ferromagnetic metal obtained from a vapor generating part 9 having a sealed-up crucible 11 containing a evaporation source material 19 is ionized at a vapor ionizing part 4 to be injected. After this, nitrogen or ammonia is supplied from a cylinder 18, and the cluster ion or nitrogen ion are generated and accelerated. Thus a nitride thin film layer of a ferromagnetic metal is formed on the above-mentioned vapor-deposited film by the reactive cluster ion beam method. |
