| 摘要 |
PURPOSE:To enhance heat efficiency without lowering the life of a thermal head, by constituting an abrasion resistant layer of a hard diamond membrane having high heat conductivity. CONSTITUTION:An abrasion resistant layer 17 is constituted of a diamond membrane. The thin diamond membrane is formed by FR-magnetron sputtering. That is, graphite is used as a target and sputtering is performed in He-gas under pressure of 1Torr under such a condition that RF power is set to a predetermined value and the temp. of a substrate to predetermined one to form the membrane. In a conventional thermal head having a Ta2O5 film with a predetermined thickness as an abrasion resistant layer, said abrasion resistant layer is abraded after running of 50-80km whereas this thermal head can withstand running of 200-250km. |
