| 摘要 |
PURPOSE:To reduce a power supply bushing, to seal gas and to readily assemble an excimer laser oscillator by attaching inductances connected in series with a plurality of preliminary discharge gaps through a power supply bushing in a laser tube. CONSTITUTION:Energy charged in a plurality of capacitors C1 is introduced through one or more power supply bushings 10 into a laser tube 1 by turning ON a switching element 5, and introduced to preliminary discharge gaps 8 through a plurality of inductances 9 in the tube 1. Thus, the number of the bushings may be reduced, a gas seal is ready, and the number of assembling steps is largely reduced. |
