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发明名称
摘要
申请公布号
JPS62121550(U)
申请公布日期
1987.08.01
申请号
JP19860009030U
申请日期
1986.01.24
申请人
发明人
分类号
H01L21/66;G01N23/20;(IPC1-7):G01N23/20
主分类号
H01L21/66
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代理人
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