| 摘要 |
PURPOSE:To easily shorten the time required to start the operation of a large- sized high vacuum apparatus ad to easily reduce the amount of a gas charged during the operation by placing a louver type variable resistance means in the exhaust path of the apparatus so as to enable the variable control of the exhaust resistance of the exhaust path. CONSTITUTION:This high vacuum apparatus is composed essentially of a vacuum vessel 1, a high vacuum pump 3 and a variable resistance means placed in an exhaust path 2 connecting the vessel 1 to the pump 3. The variable resistance means is a variable louver device 12 having a shutter whose degree of opening can be varied in steps and the exhaust resistance of the exhaust path 2 is variably regulated with the device 12. The vacuum vessel 1 is kept at a high degree of vacuum while an inert gas is charged into the vessel 1 through a feed pipe 19.
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