| 摘要 |
PURPOSE:To obtain the title apparatus which undergoes no changes in the degree of vacuum even in high-speed treatment, is high in an efficiency of generation of plasma and has an easily cleanable electrode structure, by providing a feeding means, a winding means and a plasma radiation means of a special structure in a vacuum treatment apparatus. CONSTITUTION:In a vacuum treatment vessel 1 having movable doors 12 and 13 at both ends and connected through a draft pipe 14 to a vacuum pump, a feeding means 19 for winding a long object 23 to be treated around a rotary shaft 4 in the form of a feed roll 2, a winding means 20 for winding the object 23 through a path 8 or 9 around a rotary shaft 5 in the form of a winding roll 3 and a plasma radiation means 22 comprising a plurality of rod anodes 7 and 7' and two plate cathodes 6, 6 or 6', 6' at least either of which can be opened and which are opposed to each other in such a manner that ht anodes 7 and 7' may be sandwiched between them, and a carrying means 21 comprising a guide bar, a guide roller, etc.
|
