| 摘要 |
PURPOSE:To suppress the generation of powder and fragments of such resulted product of reaction which contaminates and injures a photosensitive layer and to make mass production of a photosensitive body which has the photosensitive layer having good appearance and quality and has excellent characteristics by introducing a non-film forming gas simultaneously with a film forming gas into a reaction chamber. CONSTITUTION:The inside of the reaction chamber 1 is evacuated to a vacuum via a discharge valve 10. An RF voltage is impressed between a substrate 3 which is heated to a prescribed temp. by a heater 9 and is kept rotated via a support 2 and a counter electrode 4 to generate a glow discharge and to decompose the gases introduced into the chamber so as to form an a-Si film on the substrate 3 while the film forming gas is introduced through a film forming gas introducing pipe 8 into the chamber via the counter electrode 4 and the non-film forming gas is introduced therein through a non-film forming gas introducing pipe 21. Since the non- film forming gas is introduced into the reaction chamber 1 from the upper part thereof, the formation of the resulted product of reaction in the upper part of the reaction chamber and the region upper than the substrate 3 is little and therefore, the resulted product of reaction sticking and depositing to the inside wall in the upper part of the reaction chamber, the inside wall of a metallic cap 6 of an earth shield and near the top end of the electrode 4 is decreased. The powder and fragment-like resulted product of reaction peeling and dislodging therefrom are eventually decreased. |
