| 摘要 |
PURPOSE:To shorten the dead time with inspection and maintenance by partitioning the inside of a thermostatic chamber by partition wall, crossing and disposing the partition wall to an IC carrying line by a chute rail and each mounting inspection doors, which can be opened and closed, to respective section of the thermostatic chamber partitioned. CONSTITUTION:A partition wall 8 is set up where crossed with the arrow (b) in the direction of carrying, crossing a thermostatic chamber 6 in s shape that a surface oppositely faced to a stocker section 7 of a measuring section 5 is extended. An opening (not shown) allowing the passage of an IC 1 is formed to the partition wall 8. When a member such as the measuring section 5 gets trouble in the thermostatic chamber, an inspection window (not shown) shaped near the measuring section is opened, and inspection and maintenance are conducted. The stocker section 7 including an orienter 4 is not subjected to thermal disturbance by the action of the partition wall 8 at that time,thus remarkably shortening the dead time up to the start of reworking.
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