| 摘要 |
PURPOSE:To form a magnetic film having excellent magnetic characteristics on a substrate at high speed by a method wherein a constitution, with which the application voltage of the substrate is properly controlled in accordance with the surface roughness of the magnetic film, is provided. CONSTITUTION:The laser beam projected on the magnetic film 11, which is being grown on the surface of a substrate 6, by performing a bias sputtering is reflected on the surface of the substrate, and the density of irradiation of a light-receiving device 8 is changed in accordance with the surface roughness of the magnetic film 11. Said irradiation density is converted to voltage in the light-receiving device 8, and it is sent to a control device 9 through a wiring 10. The voltage corresponding to the proper surface roughness of the magnetic film 11 is inputted to the control device 9 in advance, and when the surface roughness is flat as compared with the voltage signal sent from the light-receiving device 8, the voltage to be applied to the power source 5 for substrate bias is reduced, and the application voltage is increased when the degree of surface roughness is increased by controlling the control device 9. As a result, the shape of the pole-like structure of the magnetic film 11 is properly formed, and the magnetic film 11 can be formed at high speed while the prescribed surface roughness is being maintained.
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