Lithium niobate waveguide structures.

摘要

An improved method of producing a lithium niobate waveguide device is described, and comprises;
<UnorderedLists id="ula01" listStyle="none"><ListItem>(i) providing an optical waveguide path (12) on a lithium niobate substrate (11);</ListItem><ListItem>(ii) depositing a layer of dielectric material (13) on the substrate;</ListItem><ListItem>(iii) depositing a layer of conducting material (14) on the dielectric layer;</ListItem><ListItem>(iv) defining one or more electrode tracks on the conducting layer using a suitable mask (15) and</ListItem><ListItem>(v) dry etching using an auto-registered process to remove the unmasked regions of the conducting layer and dielectric layer using a suitable etching medium.</ListItem></UnorderedLists>