| 摘要 |
PURPOSE:To shorten the setting time of a pattern and clear an electric potential contrast image, by changing freely the position of a probe provide in a body tube with control from the outside of the body tube. CONSTITUTION:With control from the outside of a body tube 31 by means of a probing system 4, a probe which is provided in the body tube 31 is brought into contact with the optional wiring pattern of an IC 32 to be measured, so that a signal line is connected to an IC driving power supply from the probe. For example, when a circuit block B5 is wanted to be checked, optional electric potential is supplied by bringing the probe 42 of the probing system 4 into direct contact with an input line R5 so as to set the logic of the line 5, and the IC driving power supply system 1 is set for a logic pattern. Thus, the setting time of the pattern can be shortened. Furthermore, as the irradiation frequency of electron beams becomes more, an electric potential contrast image can be cleared.
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