| 摘要 |
PURPOSE:To adjust pressure of working chamber with a high accuracy and a good stability, by connecting an exhausting system to vacuum operation chamber through a parallelly connected main valve and a bypass system for adjusting exhaust conductance. CONSTITUTION:The exhausting system A composed of a cold trap 3, an oil diffusion pump 4 and a rotary pump 5 is connected to the working chamber 1 of vacuum apparatus through the main valve 2. Further the bypass system B for adjusting exhaust conductance is connected parallelly to the valve 2, and composed by connecting a filter 9, a flow rate valuable valve 10 and an on off valve 11 in series. In starting the operation, a roughly exhausting valve 7 is fully operated, the chamber 1 is exhausted to a prescribed pressure, then is closed. Thereafter, the valve 10, then, the valve 2 are opened to exhaust the chamber 1 to a high vacuum and operating gas is introduced from a valve 8. After stabilization of pressure in the chamber 1, the valve 2 is completely closed to carry out vapor depositing operation, etc., while adjusting exhaust conductance by the system B.
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