| 摘要 |
A micro-dimensional measurement apparatus for precise non-contact measurement of distances between edges formed upon a surface, basically comprising an acousto-optical element for scanning a light beam across the surface with the scanning distance varying in accordance with a deflection voltage, a photo-sensor for sensing the intensity of resultant light reflected from the surface, and a data-processing circuits for determining when the rate of change of the reflected light intensity reaches maximum values, corresponding to positions of surface edges, and for measuring the distance between a pair of edges on the surface based upon a change in the deflection voltage occurring between the corresponding two maximum values.
|
