| 摘要 |
PURPOSE:To prevent the piezoelectric actuators from being damaged and obtaining an effective vibrationproof supporting device by constituting the captioned device so that the shift of a supporting base is absorbed by extending and contracting the upper and lower piezoelectric actuators according to the vibration of a vibrating source. CONSTITUTION:The upper and lower piezoelectric actuators 32 and 33 are extended by applying an initial voltage V0, and the gap DELTAl/2 between the hollow chamber 24 and a casing 14 is reduced to zero. When, in this state, the supporting part 2 of a vibrating source vibrates in the direction of arrows A and B, a variable load acts onto a vibrationproof supporting device, and is detected by a load detector 5, and input as a load signal Vf into a calculation part 38. The piezoelectric actuators 32 and 33 are extended and contracted by the signal supplied from the calculation part 38, and an installation rod 25 shifts up and down together with an intermediate member 9, and the propagation of the force to an installation base 4 due to the vibration of the supporting part 2 is suppressed. Further, in case of the low frequency vibration (large load), the piezoelectric actuators 32 and 33 are not applied with a load by the aid of a damper mechanism 23, and the actuator is prevented from being damaged. |
