| 摘要 |
PURPOSE:To selectively and effectively coat a fuel gas passage only with a catalyst supporting material, to reduce the volume of gas passage, and to simplify a catalyst forming process by depositing a catalyst supporting material by an optical CVD method. CONSTITUTION:An inactive gas B is jetted from a nozzle 9 through a pipe 7. A mixture gas A which is a supporting material and introduced from an introducing pipe arranged inside the pipe 7 is jetted from a nozzle 11 which is arranged between ribs. The nozzle 11 is extended to a valley between ribs 2 on fuel electrode side,a nd a suction nozzle 15 is arranged near the nozzle 11 to suck the mixture gas A. Thereby, most of the mixture gas is supplied to the valley and the concentration of the gas at the top of the rib is reduced. A mask made of laser nonpermeable material which is corresponding to the pattern of the top of the rib, is sticked on the surface of a glass plate so that a laser beam is irradiated in the valley only. Then, sheet laser is slowly scanned together with the most of gas pipes 7, 12. Therefore, the catalyst supporting particle layer is continuously formed only on the valley of the rib. |
