| 摘要 |
PURPOSE:To produce high-purity titanium silicide of an arbitrary shape, by mixing titanium with silicon or titanium silicide and melting and reacting the mixture with electron beam. CONSTITUTION:Titanium is mixed with silicon or titanium silicide. The mixture is made to react by melting with electron beam in high vacuum of about <=10<-6>Torr. Impurity components are removed simultaneous to the above reaction to obtain a purified product. For example, the above mixture 2 is charged into a water-cooled copper hearth 1, evacuated and melted with electron beam 3. The obtained titanium silicide is turned upside down and the electron beam melting is repeated. A high-purity titanium silicide having arbitrary composition can be produced by this process. |
