| 摘要 |
PURPOSE:To ensure measuring accuracy from the low flow amount state of gas to the high flow amount state thereof, by a method wherein the first cylinder of a moving member is made to move while engaged with the groove constituted of the second and third cylinders provided to a flow pipe so as to provide a minute gap and air damping function is acted on the moving member by this constitution. CONSTITUTION:The titled apparatus is constituted in order to measure the flow amount of air flowing through a flow pipe 1 constituted of housings 1a-1c and, when a moving member 3 moves along an air flow direction corresponding to the flow amount of air to be measured, the displacement quantity corresponding to said movement is converted to an electric signal by a potentiometer 18 to be taken out as the electric signal corresponding to an air amount. The outer cylinder 3b of the moving member 3 is engaged with the groove 40 constituted of the large diameter cylindrical part 1b2 and intermediate cylindrical part 1b3 of the housing so as to leave a minute gap and, when the moving member 3 moves within a range from a fully closed state to a fully opened state corresponding to the flow amount of air, an air damper chamber 10 is formed and, by this constitution, the variation of the moving member 3 is stabilized and vibration motion is suppressed.
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