| 摘要 |
PURPOSE:To prevent a design of conducting light to a photodetector using an optical fiber from becoming complicated and increasing a manufacturing cost by forming a detector pattern having a photodetector which consists of amorphous silicon on a substrate and making part of a detector a monolithic structure. CONSTITUTION:A drop sensor 20 is of a monolithic structure consisting of a chromium electrode film 22, a photodetector part 23 of amorphous silicon and a transparent electrode film 24 for bias voltage application laminated sequentially. The incident light from a light source 10 to the photodetector 23 is photoelectrically converted by the photodetector 23, and then is fed back to a control as an electric signal through a leading-in line 25 and a wiring pattern 26. The position of ink droplets which come flying-in is detected based on a value of photocurrent to be reduced by the shade of ink droplets formed on the photodetector 23. A detector patter of monolithic structure to be formed on the substrate 21 can be created by microprocessing technique. |
