发明名称 |
Arrangement for optically measuring a surface profile. |
摘要 |
<p>An optical height measuring arrangement is described in which the radiation reflected from the surface to be measured is projected towards a position-dependent radiation-sensitive detection system via a lens system. The direction of the beam which is incident on the surface is varied at a high frequency and the amplitude of the output signal of the detection system is a measure of the distance to be measured. When two detection systems are employed it is also possible to measure the surface roughness. </p> |
申请公布号 |
EP0227136(A1) |
申请公布日期 |
1987.07.01 |
申请号 |
EP19860202021 |
申请日期 |
1986.11.17 |
申请人 |
N.V. PHILIPS' GLOEILAMPENFABRIEKEN |
发明人 |
KESSELS, HENRICUS MATHIAS MARIE |
分类号 |
G01B11/24;(IPC1-7):G01B11/26 |
主分类号 |
G01B11/24 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|