| 摘要 |
PURPOSE:To obtain a real-time scanning type optical microscope by providing a photoelectric converting means which receives 0-order diffracted light emitted by an acoustooptic optical deflecting element and control means which varies electric power supplied to the acoustooptic optical deflecting element according to the output of the photoelectric converting means. CONSTITUTION:Primary diffracted light 38 for deflection is reflected by a mirror 39 to strike on a pupil projection lens 20. The primary diffracted light 38 is deflected by the acoustooptic optical deflecting element AOD 18 and the 0-order diffracted light 41 travels in the AOD 18 is straight and is guided to a photodiode 43 by a mirror 39 and a prism 42. A power control signal from a feedback circuit 45 is applied to a power control terminal 47 and a scanning waveform obtained by adding a correcting signal to a saw-tooth wave is inputted from a waveform oscillation circuit 49 to a scanning waveform input terminal 48, so that variation in angle of deflection becomes linear. A driving circuit 46 incorporates a gain control amplifier and the diffraction efficiency increases when power applied to the piezoelectric element of the AOD 18 is increased by the amplifier or decreases when the power is decreased.
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