High voltage source providing continuously regulated output voltage, preferably for supplying low-power ion and electron beam machining and evaporating apparatuses.

摘要

The invention relates to a stabilized high voltage source the output voltage of which may be regulated in wide range, whereby the adjusted output current is constant at variable load. The high voltage supply source comprises a high voltage rectifier (NE) fed by a push-pull driving circuit (MH), a control circuit (V) supplying push-pull width modulated control signals of the driving circuit (MH) and an error signal processing circuit (H) working up the divided voltage and current signals taken from the output of the high voltage source. The output signal of the error signal processing circuit (H) is applied to the control circuit (V) as a control signal. The supply voltage of auxiliary circuits of the supply source is provided by a stabilized low voltage supply unit.