| 摘要 |
PURPOSE:To improve the durability and the reliability of an X-Y table by using movable guide bearings having roller circulating holders as movable guide bearings for guiding the table for supporting a bonding head of a wire bonder in X- and Y-directions. CONSTITUTION:Rollers 73 as one row of rollers roll on rails 71 as linear guides on roller rolling surfaces 71 of the rails 71 while circulating through roller guide grooves 74 as rolling surfaces in a circulating holder 72. Y- and X-tables 32, 33 move in a direction of arrow Y by a linear motor 7, and an X-table 33 moves in a direction of arrow Y by a linear motor 5. The movement of the table 33 in a direction Y is not disturbed by the motor 5 by a linear guide 52. Thus, the durability and the reliability as a wire bonding apparatus are improved. |
