发明名称 Wire for bonding a semiconductor device and process for producing the same
摘要 The present invention eliminates the problems associated with the use of oxygen-free copper and other high-purity copper materials as bonding wires. At least one rare earth element, or at least one element selected from the group consisting of Mg, Ca, Ti, Zr, Hf, Li, Na, K, Rb and Cs, or the combination of at least one rare earth element and at least one elemented selected from the above-specified group is incorporated in high-purity copper as a refining component in an amount of 0.1-100 ppm on a weight basis, and the high-purity copper is subsequently refined by zone melting. The very fine wire drawn from the so refined high-purity copper has the advantage that it can be employed in high-speed ball bonding of a semiconductor chip with a minimum chance of damaging the bonding pad on the chip by the ball forming at the tip of the wire.
申请公布号 US4676827(A) 申请公布日期 1987.06.30
申请号 US19860844350 申请日期 1986.03.26
申请人 MITSUBISHI KINZOKU KABUSHIKI KAISHA 发明人 HOSODA, NAOYUKI;MORIKAWA, MASAKI;UCHIYAMA, NAOKI;YOSHIDA, HIDEAKI;ONO, TOSHIAKI
分类号 C22C9/00;C30B13/00;H01B1/02;H01L21/48;H01L23/49;(IPC1-7):C22B9/00 主分类号 C22C9/00
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