发明名称 |
Optical disk transmission monitor for deposited films |
摘要 |
An optical transmission monitor for determining the optical transmissivity and thickness of films deposited on a substrate. A monitor substrate in the form of a rotating disk exposed to the deposition process is used. An optical system for measuring the transmissivity of the disk obstructs a fixed segment of the rotating disk so that the film thickness on the monitor disk is a known fraction of the film on the substrate being processed.
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申请公布号 |
US4676883(A) |
申请公布日期 |
1987.06.30 |
申请号 |
US19860835157 |
申请日期 |
1986.03.03 |
申请人 |
SIERRACIN CORPORATION |
发明人 |
NELSON, ROGER E.;LUCKY, CLYDE L. |
分类号 |
C23C14/54;G01B11/06;G01N21/84;(IPC1-7):C23C14/00 |
主分类号 |
C23C14/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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