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发明名称
Vernickelungsloesung zum stromlosen Vernickeln von Siliciumscheiben
摘要
申请公布号
DE1298827(B)
申请公布日期
1969.07.03
申请号
DE196601S2623
申请日期
1966.03.19
申请人
SIEMENS AG
发明人
BRUNO REISS,
分类号
C23C18/36;H01L21/288
主分类号
C23C18/36
代理机构
代理人
主权项
地址
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