| 摘要 |
PURPOSE:To obtain a correct electron microscopic image, by bending a mirror body between a sample rest and a two-dimensional sensor, providing an electron beam deflecting means thereon, and not opposing an image-formation surface on the two-dimensional sensor to the filament of an electron gun. CONSTITUTION:Electron beams 2 which are the stream of thermoelectrons radiated from a filament 3a are transmitted through a sample 8 which is placed on a sample rest 5, and are refracted by an objective lens 6 so as to define the enlarged transmission image 8a of the sample 8. This enlarged transmission image 8a is imaged and projected to an image-formation surface 9 by a projection lens 7. Furthermore, a mirror body portion 1a is bent between the image- formation surface 9 and the sample rest 5, and the electron beams 2 are deflected by an electron beam deflecting means 30 provided on this bent portion, so that the image-formation surface 9 is averted from the extended line 40' of the optical axis 40 of the electron beams between the filament 3a and the sample rest 5.
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