| 摘要 |
PURPOSE:To contrive the improvement of processing speed with the same power supply by providing proper shapes and arrangement of electrodes. CONSTITUTION:A cylindrical ceramic table 6 is arranged on a base 5 which is vacuum-connected to a box 4 and a disc-form electrode 2 of 15mm thickness and 180mm diameter is arranged on the ceramic table 6. A base 1 is held by the disc-form electrode 2. The shape of an opposite electrode 3 is, for example, cylindrical and this electrode is kept with a desired gap (for example 8mm) from the disc-form electrode 2 by a firing region (FR). When discharge surface area on the first electrode 2 is S1 and that on the second electrode 3 is S2, these two electrodes are so arranged that S2/S1>1/3 is satisfied.
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