Polishing machine and method of attaching emery cloth to the polishing machine

摘要

A polishing machine has an upper polishing plate and a lower polishing plate provided below the upper polishing plate. The upper polishing plate has slurry passages. Plugs for supplying slurry are detachably quick coupled to the slurry passages. A piece of polishing pad is bonded to the lower surface of the upper polishing plate. After a spent polishing pad has been removed and a fresh polishing pad has been attached to the lower surface of the upper polishing plate, a hole-cutter is downwardly inserted in each slurry passage until it pierces the fresh polishing pad, thus cutting a hole in the polishing pad.