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发明名称
摘要
申请公布号	JPS6296843(U)	申请公布日期	1987.06.20
申请号	JP19850189214U	申请日期	1985.12.09
申请人		发明人
分类号	H01L21/30;G03F7/20;H01L21/027;(IPC1-7):H01L21/30	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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