| 摘要 |
PURPOSE:To obtain the titled device increased in the stability during transfer by prevention of contamination and damage by a method wherein the rim of a wafer is held by contact at least at three points. CONSTITUTION:One ends of operating arms 4 (a, b, and c) are pivotally supported via fulcrums 5 of respective holding arms 3 (a, b, and c) to the halfways thereof, and the other ends via fulcrums 7 to a guide 2, respectively. A rod 8 penetrates through the guide and can move, and the tail ends of the arms 3 are pivotally supported via fulcrums 6 to the lower ends 8a. When the rod is slid along the guide via return spring 10 in the direction of an arrow A or B, the three arms 3 open and close at the degree of angles. Then, the rim of the wafer is held by contact at hook parts at the tips 9 by closure of the arms 3. This construction enables to obtain the holder easy of handling wafers which does not affect the front and back surfaces thereof. |
