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发明名称
METHOD FOR SPUTTERING
摘要
申请公布号
CA832694(A)
申请公布日期
1970.01.20
申请号
CAD832694
申请日期
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
LEON I. MAISSEL;PIETER D. DAVIDSE
分类号
主分类号
代理机构
代理人
主权项
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